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Tag: mapper

Posted on 27/07/202006/08/2021

System Architecture of the Pattern Streamer for Mapper Lithography

mapper

by Edwin Hakkennes, Technical Architect, Technolution

Mapper pursued a lithography tool for Maskless Lithography, based on a massive number of e-beams. These e-beams are collectively positioned, and individually switched on and off.

Continue reading “System Architecture of the Pattern Streamer for Mapper Lithography”

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