The co-integration of optical sensors with standard CMOS technology enables new smart optical sensor systems. The presentation displays how highly advanced detector technologies like pinned photodiodes, SPADs, or CCDs can be integrated into a standard CMOS process without detrimental intervention into the standard CMOS process flow.
Some application examples using smart optical sensors demonstrate the potential of these technologies for low-cost volume production.
About Werner Brockherde
Werner Brockherde received the Dipl.-Ing. degree in Electrical Engineering from the University of Dortmund, in 1982. For two years he worked as research assistant at the University of Dortmund, working in the field of analog and digital CMOS IC design.
In 1985 he joined the Fraunhofer Institute of Microelectronic Circuits and Systems, Duisburg, where he is heading the Department of Optical Sensor Systems.
His scientific interests are in optical CMOS sensors. He has authored and co-authored more than 150 scientific papers. Since 1994 he is member of the Technical Program Committee of the European Solid-State Circuits Conference.
About Fraunhofer IMS
The Fraunhofer IMS – founded in 1984 – is one of 67 independent institutes of the Fraunhofer-Gesellschaft. The main focus of its activities is related to CMOS and microsystems technology. Having a staff of >250 mainly scientific employees, IMS is operating an industrial-standard CMOS fab and a microsystems Lab&Fab.
In accordance with the general principle of the Fraunhofer Gesellschaft the Fraunhofer IMS carries out research, development, and pilot fabrication of microelectronic solutions for private and public clients.