In advanced lithography tools, sub-nanometer positioning accuracy is required. Small deformations can affect machine performance and need to be monitored. Therefore ASML is developing high accuracy deformation sensors employing photonic IC technology.
About Iwan Akkermans
Iwan Akkermans received the M.Sc. degree (2004) and Ph.D degree (2009) in Electrical Engineering at the Eindhoven University of Technology. His Ph.D. work focused on the development of planar beam-forming antenna array for 60-GHz broadband communication. From 2009 onwards, he worked for ASML as architect within the Research department. His research involves high accuracy sensor and actuator design as well as electron beam optics.
ASML is one of the world’s leading manufacturers of chip-making equipment.